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  to ky o seimit su surfcom nex series offers three measurement functions (roughness, contour and roughness/contour). detectors are freely selectable in accordance with users' needs. adoption of multi-sensor technology allows for the single purpose function by a single detector, or the multipurpose functions by combining multiple detectors. the system allows for f exible conf guration capability for users' needs, as in use of detector dedicated to contour or in use of 3d roughness measuring unit. hybrid detector with dual sensor technology nex100 (e-dt-cr14a) patented surfcom nex 100 wide flexibility of allowing for selection of a combination from detectors, driver unit and measuring stands, in accordance with users' aim. nex series nex availability of the dual sensor technology. the combination of a wide-range high-accuracy sensor and a narrow-range high resolution sensor allows for simultaneous measurements. this new operating principle enables you to measure surface roughness and contour at the same time, thus no longer requiring the change of detectors and increasing measurement eff ciency. surface texture C contour measuring instruments surface texture and contour integrated measuring instruments dedicated catalog is available. 16 dual sensor wide-range high-accuracy sensor for contour measurement z-axis indication accuracy (1.0+|2h|/100) m narrow-range high resolution sensor for roughness measurement resolution/measuring range 1.0 nm/0.05 mm to 100 nm/5 mm wide-range high-accuracy sensor for contour measurement z-axis indication accuracy (1.0+|2h|/100) m narrow-range high resolution sensor for roughness measurement resolution/measuring range 1.0 nm/0.05 mm to 100 nm/5 mm
nex 17 surface texture and contour combined measuring instruments contour measuring instruments surface texture measuring instruments surface texture and contour integrated measuring instruments hybrid detector with dual sensor technology e-dt-cr14a contour detector e-dt-ch18a general purpose detector equipped with a newly-developed high-precision scale. the z-axis measurement range is 60 mm. stress-free replacement is possible with the newly-developed quick-change mechanism of arm. upward/downward measurements are optionally available. high-accuracy contour detector with automatic measuring force adjustment mechanism e-dt-ch19a high accuracy type detector equipped with a new laser diffraction linear scale. the full-range measurement resolution is 0.02 m. it features an automatic adjustment mechanism of measuring forc e as well as the z-axis measurement range of 60 mm and quick-change arm mechanism. upward/downward measurement is optionally available. pickup for roughness measurement e-dt-ss01a multiple sensors are available. detectors can be selected by application. this machine offers hybrid, roughness, contour, and combined functions. the surfcom nex series allows you to select detectors by applic ation. detectors can be used as a single detector or combined with others to serve as multiple sensors. an integrated measuring instrument with newly developed dual sensor technology capable of measuring roughness and contour simultaneously. please refer to the next page for details. a pickup with compact design for high magnifcation and wide-range measurements. its outer diameter is 14 mm, measurement range is 1000 m, and its maximum measurement magnifcation is 500,000 times. it is used for pickup upward measurements (with the auto-stop f unction) and horizontal trace measurements. surfcom nex allows you to decide specifications by selecting necessary detectors. you can add sensors after installation to upgrade its ability. to ky o seimit su
general-purpose detector for contour measurement nex030 (e-dt-ch18a) high-accuracy detector for contour measurement nex040 (e-dt-ch19a) pickup for roughness measurement nex001 (e-dt-ss01a) detector with correction function for temperature effects to provide the highest-in-class accuracy general purpose detector equipped with a newly-developed high-precision scale. the z-axis measurement range is 60mm. stress-free arm replacement is possible with the newly-developed quick-change arm mechanism. upward/downward measurement is optionally available. high-accuracy detector with built-in auto balance (automatic measuring force adjustment) function this is new high accuracy detector equipped with laser optical diffraction scale. the measurement resolution under full-range measurement is 0.02 m. in addition to z-axis measurement range of 60mm and quick-chang e arm mechanism, the automatic measuring force adjustment mechanism is provided. upward/downward measurement is optionally available. measuring resolution 0.04 m (full range) indication accuracy (1.5 + |2h|/100) m measuring resolution 0.02 m (full range) indication accuracy (0.8 + |2h|/100) m example of diameter measurement using t-shaped stylus the specifcation of the pickup for roughness measurements is 1000 m. this is the pickup with compact design for high magnifcation and wide-range measurement. the specifcation of pickup are; outer diameter: 14mm, measurement range: 1000m, maximum measurement magni- fcation: 500,000 times. measurement with upward pickup posture (with auto-stop function) and horizontal trace measurement are available. 14 surface texture C contour measuring instruments surface texture and contour integrated measuring instruments 18 to ky o seimit su
to ky o seimit su nex 19 surface texture and contour integrated measuring instruments surface texture measuring instruments contour measuring instruments surface texture and contour combined measuring instruments t-shaped stylus option for upward/downward contour measurements masterball calibration unit for upward/downward measurements e-mc-s97a this is a calibration unit to guarantee the spatial accuracy of upward and downward measure- ments using surfcom nex 030/040. use this unit to calibrate the parameters required to set the stylus upward/downward. arc correction and stylus tip radius correction performed based on the calculated parameter provides advanced measurements. dimensions: 150(w) x 120(d) x 230(h) mm weight: approx. 3.3 kg stylus for upward/downward measurements the stylus designed for the upward/downward measure- ment using surfcom nex 030/040. length tip radius edge angle material dm83502 l=26 mm r tip =25m 24 conical cemented carbide dm83503 l=32 mm r tip =25m 24 conical cemented carbide dm83504 l=44 mm r tip =25m 24 conical cemented carbide 24 conical , r tip =25m l 3 mm attachment for quick change arm (option)(dm83506) this attachment attaches conventional arms to a quick change type contour measurement detector. you can continue the use of the arms of your conventional measuring instrument to save cost. it is designed to make the t otal length when combining the attachment and the conventional arms be the same as that of the supplied standard arm. even when the conventional a rm is used, the detectors z-aixs measurement range (60 mm(30 mm)) can be ensured. for applicable arms, contact our sales representative. example of using the quick-change arm attachment no screwdriver or other tool for detector replacement (option) this is an option effective for the users who replace sensors (detector/pickup) frequently. the wider clearance between the drive part and the detector allows easy replacement of the detector. it is equipped with special pin for mounting/removing detector. you can easily mount/remove the detector by pulling out the special pin and turning it to either of left or right by a half turn. no sc rewdriver or other tool is required. when the pin is retracted when the pin is pulled out the detector is locked or unlocked by a half turn clockwise or counterclockwise respectively.
product name surfcom nex dx/sd - detector type tracing driver and measuring stand item detector/pickup model (commodity code) remarks hybrid detector with dual sensor technology for contour measurement pickup for roughness measurement * three digit code shows the followings. third digit (hundreds place): presence or absence of hybrid detector 0 = hybrid detector is not provided 1 = hybrid detector is provided second digit (tens place): presence or absence of detector for contour measure - ment 0 = contour detector is not provided 3 = contour detector (general-purpose) is provided 4 = contour detector (high-accuracy) is provided first digit (ones place): presence or absence of detector for roughness mea - surement 0 = roughness detector is not provided 1 = roughness detector is provided general-purpose detector high-accuracy detector model e-dt-cr14a e-dt-ch18a e-dt-ch19a e-dt-ss01a external view model name 100 - - - k2 100 130 - - k2 130 140 - - k2 140 101 - - k2 101 131 - k2 131 141 - k2 141 030 - - - k2 030 040 - - - k2 040 001 - - - k2 001 031 - - k2 031 041 - - k2 041 detector selection type selection item type model (commodity code) dx sd external view specifications destination japan overseas japan overseas computer included included not included included included not included model name dx - - - - - k2 a - - - - - k2 b - - - - - k2 c sd - - - - - k2 d - - - - - k2 e - - - - - k2 f selection of tracing driver and measuring stand item tracing driver measuring stand model (commodity code) model e-rm-s214a e-rm-s215a e-st-s389a e- cl- s148a e-st-s389a e-cl-s150a e-st-s390a e-cl-s150a e-st-s390a e- cl- s151a external view tracing driver x-axis stroke (mm) 100 200 - - - - measuring stand base width (mm) - - 600 600 1000 1000 depth (mm) - - 450 450 450 450 maximum payload (kg) *1 - - 82 72 89 79 - - 76 66 83 73 column up and down stroke (mm) - - 250 450 450 650 model name 12 - - - - k2 a 13 - - - - k2 b 14 - - - - k2 c 15 - - - - k2 d 22 - - - - k2 e 23 - - - - k2 f 24 - - - - k2 g 25 - - - - k2 h surface texture C contour measuring instruments surface texture and contour integrated measuring instruments 20 *1 the upper is the maximum payload when having 100 mm tracing driver. the lower is the maximum payload when having 200 mm tracing driver. to ky o seimit su
nex measuring unit hybrid detector with dual sensor tech - nology (e-dt-cr14a) measuring range z-axis (mm): vertical direction 5.0 (standard arm), 10.0 (2x arm) roughness sensing method differential inductance measuring range (mm) 0.05 to 5.0 resolution (nm) 1.0 to 100 contour measurement (h: measuring height (mm)) sensing method high-accuracy scale measuring range (mm) 5.0 resolution (m) 0.015 (full range) indication accuracy (m): vertical direction (1.0 + |2h|/100) *when lh = 50 mm stylus is used stylus for roughness and contour model dm84071 (lh=50 mm, standard arm) measuring force (mn) 0.75 stylus material diamond stylus shape 2 mr/60 conical for contour model dm48775 (lh = 100 mm, 2x arm) measuring force (mn) 4.0 stylus material cemented carbide stylus shape 25 mr/24 conical replacement method replaceable common function downward measurements /upper limit detection safety mechanism /retract function detector general-purpose contour detector (e-dt-ch18a) measuring range z-axis (mm): vertical direction 60.0 contour measurement (h: measuring height (mm)) sensing method laser optical diffraction scale measuring range (mm) 60.0 resolution (m) 0.04(full range) indication accuracy (m): vertical direction (1.5 + |2h|/100) function downward/upward measurements /lower/upper limit detection safety mechanism /retract function stylus tip for contour model dm45505 replacement method replaceable measuring force (mn) 10 to 30 stylus material cemented carbide stylus shape 25 mr/24 conical high-accuracy contour detector (e-dt-ch19a) measuring range z-axis (mm): vertical direction 60.0 contour measurement (h: measuring height (mm)) sensing method laser optical diffraction scale measuring range (mm) 60.0 resolution (m) 0.04(full range) indication accuracy (m): vertical direction (1.5 + |2h|/100) function downward/upward measurements /lower/upper limit detection safety mechanism /retract function stylus tip for contour model dm45505 replacement method replaceable measuring force (mn) 10 to 30 stylus material cemented carbide stylus shape 25 mr/24 conical pickup for roughness measurement (e-dt- ss01a) measuring range z-axis (m): vertical direction 1000 roughness measurement sensing method differential inductance measuring range (m) 6.4 to 1000 resolution (nm) 0.1 to 20 function downward/upward measurements /upper limit detection safety mechanism stylus for roughness model dm43801 replacement method replaceable measuring force (mn) 0.75 stylus material diamond stylus shape 2 mr/60 conical other power supply voltage (v), frequency (hz) single-phase ac100 to 240, 50/60 power consumption (va) max. 670 air supply (for antivibration table) supply pressure (mpa) 0.45 to 0.7 working pressure (mpa) 0.4 air consumption (l/min) 0.1 (max. 10) supply position main body back side *air supply connecting port diameter rc1/4 male screw (outside diameter 6 mm one-touch pipe joint for tube) setting envitonment temperature temperature of accuracy guarantee (c) 20 5 (temperature change rate 0.5c/hour and 0.1c/measurement time.) temperature of operation guarantee (c) 10 to 30 storage temperature (c) 5 to 40 humidity humidity of operation guarantee (%) 40 to 80 (without condensation) storage humidity (%) 80 or lower (without condensation) model surfcom nex 12 13 14 15 22 23 24 25 tracing driver x-axis (l: measuring length:mm) sensing method linear scale straightness accuracy when hybrid detector with dual sensor technology is used (m) (0.05 + 1.0l/1000) *when standard arm is used when high-accuracy detector for contour measurement is used (m/mm) 1.0/100 2.0/200 when general-purpose detector for contour measurement is used (m/mm) 1.0/100 2.0/200 when pickup for roughness measurement is used (m) (0.05+1.0l/1000) x-axis indication accuracy (m) : lateral (1.0 + 1.0l/100) resolution (m) 0.016 speed (mm/s) moving speed 0.03 to 60 measuring speed 0.03 to 20 tilt angle () when hybrid detector with dual sensor technology is used 10 (optional tilting device) other than above 15 (optional tilting device) measuring stand column speed (mm/s) travel speed max. 10 base material gabbro 21 surface texture and contour integrated measuring instruments surface texture measuring instruments contour measuring instruments surface texture and contour combined measuring instruments * power and air supply and a connecting hose are required before the delivery. * the power supply must be grounded (type d grounding). * the temperature change rate for guaranteed accuracy is limited to 0.5c/hour and 0.1c/measurement time. * contents of the specifcation may be changed without any notice due to product modifcations. to ky o seimit su
surface texture C contour measuring instruments surface texture and contour integrated measuring instruments 22 dx type main unit dimentions measuring range (mm) base (mm) weight (kg) width depth height table height colum height x-axis (tracing driver) z-axis (column) width depth main unit weight *1 max. load - ing weight model code w 1 d 1 h 1 h 2 h 3 - - w 2 d 2 - - dx 12 k2 a b c a 960 762 1478 855 623 100 250 600 450 245 (275) 82 13 b 960 762 1678 855 823 100 450 600 450 255 (285) 72 14 c 1360 840 1673 850 823 100 450 1000 450 395 (425) 89 15 d 1360 840 1893 850 1043 100 650 1000 450 405 (435) 79 22 e 960 762 1478 855 623 200 250 600 450 250 (280) 76 23 f 960 762 1678 855 823 200 450 600 450 260 (290) 66 24 g 1360 840 1673 850 823 200 450 1000 450 400 (430) 83 25 h 1360 840 1893 850 1043 200 650 1000 450 410 (440) 73 dx type 12 13 22 23 dx type 14 15 24 25 *tracing driver tilting device is optional. *air supply connecting port rc 1/4 male screw (outside diameter 6 mm one-touch pipe joint for tube) * weights in parentheses include pc, driver unit, monitor and printer (dx model only). *tracing driver tilting device is optional. *air supply connecting port rc 1/4 male screw (outside diameter 6 mm one-touch pipe joint for tube) dimensional outline drawing, dimensional drawing to ky o seimit su
nex 23 surface texture and contour integrated measuring instruments surface texture measuring instruments contour measuring instruments surface texture and contour combined measuring instruments sd type main unit dimentions measuring range (mm) base (mm) weight (kg) width depth height table height colum height x-axis (tracing driver) z-axis (column) width depth main unit weight *1 max. load - ing weight model code w 1 d 1 h 1 h 2 h 3 - - w 2 d 2 - - sd 12 k2 d e f a 600 638 1441 818 623 100 250 600 450 120 (145) 2 42 82 13 b 600 638 1641 818 823 100 450 600 450 130 (155) 252 72 14 c 1000 780 1663 840 823 100 450 1000 450 215 (240) 472 39 15 d 1000 780 1883 840 1043 100 650 1000 450 225 (250) 488 29 22 e 600 638 1441 818 623 200 250 600 450 125 (150) 247 76 23 f 600 638 1641 818 823 200 450 600 450 135 (160) 256 66 24 g 1000 780 1663 840 823 200 450 1000 450 220 (245) 483 33 25 h 1000 780 1883 840 1043 200 650 1000 450 230 (255) 493 23 sd type 12 13 22 23 sd type 14 15 24 25 gross weights in lower lines include optional anti-vibration table, bench, rack and printer (sd model only). *tracing driver tilting device is optional. *air supply connecting port rc 1/4 male screw (outside diameter 6 mm one-touch pipe joint for tube) *tracing driver tilting device is optional. *air supply connecting port rc 1/4 male screw (outside diameter 6 mm one-touch pipe joint for tube) dimensional outline drawing, dimensional drawing * weights in parentheses include pc, driver unit, monitor and printer (dx model only). to ky o seimit su


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